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| Flow rate(NM3/min) | Model |
| 0.5 | 1030 |
| 0.85 | 1050 |
| 1.2 | 1070 |
| 1.7 | 1140 |
| 3 | 2010 |
| 5 | 2020 |
| 7.8 | 2030 |
| 11.7 | 2050 |
| 16 | 3050 |
| 24~26 | 3075 |
| 32~37 | 5060 |
| 40~46 | 5075 |
| Precision(um) | Oil Residue Component(ppm) |
| V Level:3 | 5 |
| Z Level:1 | 0.5 |
| Y Level:0.1 | 0.1 |
| X Level:0.01 | 0.01 |
| A Level:0.01 | 0.003 |
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