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| Flow rate(NM3/min) | Model |
| 0.4 | 004 |
| 0.7 | 007 |
| 1 | 009 |
| 1.5 | 015 |
| 2.4 | 024 |
| 3.5 | 035 |
| 6 | 060 |
| 9 | 090 |
| 12 | 120 |
| 15 | 150 |
| 24 | 240 |
| Precision(um) | Oil Residue Component(ppm) |
| Q Level:5 | 5 |
| P Level:1 | 1 |
| S Level:0.01 | 0.01 |
| C Level:0.01 | 0.003 |
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